The LYRA3 FEG is a favorable combination of SEM and FIB for demanding users
It is based on a high resolution Schottky FEG-SEM column and a high performance FIB column.
This new generation of field emission scanning electron microscopes (LYRA3 series) provides users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all the while maintaining the best price to performance ratio.
The LYRA3 series was designed with respect to a wide range of FIB-SEM applications and needs in today’s research and industry. Its excellent resolution at high beam currents has proved to be advantageous for analytical applications such as EDX, WDX, EBSD, 3D tomography, etc. Their powerful software turns these TESCAN FIB-SEMs into excellent tools for other applications, such as e.g. electron/ion lithography, TEM sample preparation, etc.
LYRA3 focused ion beam scanning electron microscope is manufactured in configurations with XM and GM chambers.

Modern Optics

  • Fully automated electron optics set-up and alignment
  • Fast imaging rate
  • Unique live stereoscopic imaging using advanced 3D Beam Technology opens up the micro and nano-world for an amazing 3D experience and 3D navigation
  • E-Beam lithography available with an optional Beam Blanker

High Performance Ion Optics

  • Sophisticated high performance CANION FIB system for fast and precise cross-sectioning and TEM sample preparation
  • Optional ultra-high resolution COBRA-FIB column represents the highest level of technology in terms of resolution both for imaging and milling. This is one of the most precise FIB instruments for nano-engineering in the world.

FIB Part

  • Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect
  • Motorized aperture changer with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as a standard
  • Simultaneous SEM imaging with FIB etching or deposition
  • FIB control is fully integrated in the SEM software 
  • Powerful toolbox for basic shapes creation with programmable process parameters
  • Micro/nano machining
  • Ion beam lithography

Documents for download

LYRA3 brochure
Focused ion beam scanning electron microscope for high-performance in nanoengineering. Download LYRA3 brochure!